The ADXRS623 series Angular Rate Sensor (Yaw Rate Gyroscope) that uses the Analog Devices, Inc., surface-micromachining process to create a functionally complete angular rate sensor integrated with all required electronics on one chip. The manufacturing technique for this device is the same high volume BiMOS process. The output signal, RATEOUT (1B, 2A), is a voltage proportional to the angular rate about the axis that is normal to the top surface of the package. The output is ratiometric with respect to a provided reference supply. An external capacitor sets the bandwidth. Other external capacitors are required for operation. A temperature output is provided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal conditioning circuits.
