The KXTJ2-1009 is a silicon micro machined 3-axis Digital Accelerometer. The sense element is fabricated using Kionix's proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. Voltage regulators are used to maintain constant internal operating voltages over the range of input supply voltages. The I2C digital protocol is used to communicate with the chip to configure the part and monitor outputs.
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